Vanadium Dioxide (VO2) Sputtering Target

Metal oxide refers to a binary compound composed of oxygen and another metal chemical element. It can usually be made into solid ceramic materials by hot pressing, and then processed into sputter targets and other scientific research costs. Under normal circumstances, thin films made of metal oxides have special properties in optical and electrical aspects.
Description of VO2 Sputter
VO2 sputter target is usually in dark green or blue color. VO2 has a quite low phase transition temperature. Due to the properties could change up several orders, its widely used in sensors, imaging and other electronic components. Also, this property lead to the difficulty to obtain pure vanadium dioxide, without the interference of other vandium oxides, such as V3O4. In most of cases, the finished VO2 target is actually mixture of VO2 and V3O4 but usually affect little on the property of thinfilm produced by sputtering.

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