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Overview
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Tantalum Oxide (Ta2O5) is a dielectric material with high refractive index and excellent insulating properties. It is used in capacitors, optical coatings, and as a gate dielectric in transistors. Thin films of Ta2O5 can be deposited using techniques such as sputtering, atomic layer deposition (ALD), and CVD, providing high-quality insulating and optical layers for electronic and photonic devices.
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- Properties
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Overview
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