Tungsten Oxide (WO3) Sputtering Targets

Tungsten oxide (WO3) is a semiconducting material with a wide bandgap and interesting electrochromic and gas-sensing properties. It has a monoclinic crystal structure and can be deposited as thin films using sputtering techniques. Sputtered WO3 films have been extensively studied for their application in smart windows, where they can modulate the transmittance of light and heat in response to an applied voltage. The electrochromic behavior of WO3 allows for dynamic control over the optical properties of windows, leading to improved energy efficiency in buildings. Additionally, WO3 films have shown promise in gas sensing applications, particularly for the detection of toxic and flammable gases. The high surface area and reactive nature of sputtered WO3 films enhance their sensitivity and selectivity towards target gas species. The ability to deposit WO3 by sputtering has facilitated the development of advanced electrochromic and gas-sensing devices.

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