Aluminum Scandium (Al/Sc) Sputtering Targets

The aluminum-scandium (Al/Sc) system is a metal alloy with improved mechanical and electronic properties compared to pure aluminum. The addition of scandium enhances the alloys strength, recrystallization temperature, and resistance to electromigration, which are crucial for the reliability of interconnects and metallization layers in integrated circuits. Al/Sc alloys can be deposited using thin-film deposition techniques, such as sputtering, and integrated with semiconductor manufacturing processes. The enhanced performance and thermal stability of Al/Sc make it a promising material for advanced interconnect and packaging applications in high-power, high-speed, and high-temperature electronic devices.

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