Polytetrafluoroethylene (PTFE) Sputtering Target

PTFE, with chemical formula C2F4, is a quite common thermal resistance plastic material. Although plastic is not common as a sputter target, PTFE is consumed in some special waterproof/hydrophobic or electric resistance thin film coating for special electric components. As a polymer, PTFE material is frequently coated to mechanical parts by spray. However, due to the high chemical stability property of PTFE, it is hard to be coated without additive, such as PFOA(which is considered a toxic material). Also, the traditional coating method can't fulfil thin film coating for mirror smooth surface. To solve these problems, PVD and CVD process were developed to make special thin film coatings of PTFE. Especially for sputtering, it has the advantage to conduct co-sputtering process of PTFE with other material, to obtain composite thin films, which has extra desirable functions.
As an electric insulator, PTFE target is usually sputtered by PLD (Pulsed Laser Deposition)method.
Due to the large thermal expansion coefficient of PTFE, extra caution is required when sputtering it with a metal backing plate. High efficient cooling system is recommended, as PTFE material could be melt after 300C.

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