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Overview
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Samarium oxide is a rare-earth oxide with a monoclinic crystal structure. It has been studied for its potential use in various applications, including as a catalyst, a high-k dielectric material, and a component in optical materials. Sm2O3 thin films prepared by sputtering have been investigated for their use in microelectronics, particularly in metal-oxide-semiconductor (MOS) devices and as a gate dielectric material.
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Overview
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