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Overview
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Scandium oxide is a rare-earth oxide with a cubic crystal structure. It has a wide bandgap and a high dielectric constant, making it attractive for various electronic applications. Sc2O3 thin films deposited by sputtering have been explored for their use as high-k dielectrics in microelectronics, particularly in metal-oxide-semiconductor (MOS) devices and as a gate dielectric material in field-effect transistors (FETs).
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