Dynamic Ultra Micro Hardness Tester

Cat. No. Specification Unit Price Quantity
MTI1503237-01 Test Force Range: Full scale of 0.1 to 1,961 mN EA Inquiry

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Product Description
Product Description
A new evaluation system for measuring the material strength of micro regions, such as semiconductors, LSI, ceramics, hard disks, vapor deposited films, and thin coating layers, not addressed by previous hardness testers. It can also be used to evaluate the hardness of plastics and rubbers. This instrument uniquely measures dynamic indentation depth, not the indentation after the test. This in turn permits measurement of very thin films and surface (treatment) layers that are impossible to measure with conventional methods. Additionally, this same method supplies the data needed to calculate elastic modulus on the test specimens.
Features
• Evaluation of Hardness and Material Parameters in Accordance with Standards (ISO 14577-1 Annex A)
Measure the behavior of a specimen as an indenter is pressed into it and evaluate the hardness, elastic modulus, and amount of work done during indentation, in compliance with and ISO 14577-1 (instrumented indentation test for hardness) Annex A.

• Highly Precise Evaluation of Elastic Modulus
Perform highly precise evaluation of the elastic modulus, using correction based on instrument rigidity and the shape of the intender tip*1.

• Low Test Force with Measurement Resolution of 0.196 μN
Control the test force using a high resolution of 0.196 μN. This allows measurement of material strength properties in micro regions and in the outermost surfaces of specimens.

• Ultra-Wide Test Force Range of 0.1 to 1,961 mN
Use a wide test range of 0.1 to 1,961 mN for measurement, and test a variety of industrial materials, including rubber, plastics, and ceramics.

• High-Precision Measurement of Indentation Depth
No need to measure the actual indentation. Specimen indentation depth can be measured in units of 0.0001 μm for depths up to 10 μm.

• Supports a Wide Range of Testing Methods
Record the relationship between the test force and the indentation depth. Test both the unload and load processes. Use the DUH-211S to perform cyclic load-unload tests and step load-unload tests.

• Supports Vickers Hardness Test
Function to measure the length of diagonals is provided as a standard feature. This function allows you to measure the hardness that corresponds only to plastic deformation, Vickers hardness, and Knoop hardness. (A Vickers indenter and Knoop indenter are available as options.) Maximum microscope magnification is 500x (1000x is available as an option)

*1 Indenter tip shape correction is only available for the 115-degree triangular pyramid indenter. Shape correction is not available for other indenters.
Specifications
P/N: 344-04250-XX (Windows 10)
Required PC Specifications: OS: PCI Express x1 (full-length), 2 slots min. more than one x1 slot is reguired (or slot size x2 or more)
Specimen Stage: Vertical Distance: Approx. 60 mm
Specimen Stage: Area: Approx. 125 (W) x 125 (L) mm
Specimen Stage: Stage Movement Range: 25 mm in both X and Y directions
Specimen Stage: Specimen Holder: Specimen dimensions (i.e., 8 (thickness) x 30 (width) mm) when thin-type attachment (type 3) is used
Required PC Specifications: OS: Windows® 10 Pro (64 bit edition)
Required PC Specifications: OS: CD-ROM drive
Utilities: Power Supply: Single phase, AC 100-115 V ± 10%, AC 230 V ± 10% (Ground resistance 100 Ω max.)
Micrometer: Effective Measurement Range: 200 µm (with x50 objective lens)
Utilities: Power Consumption: Approx. 100 W (not including power consumption of PC)
Utilities: Grounding: The ground terminal on 3-prong connectors must be properly grounded with grounding resistance at 100 Ω or less.
Utilities: Temperature: Recommended temperature: 23±1°C,Allowable range: 10°C to 35°C
Utilities: Vibration: Horizontal vibration: 0.017 Gal max. (at 10 Hz or more), 0.01 µm max. (at less than 10 Hz),Vertical vibration: 0.010 Gal max. (at 10 Hz or more), 0.005 µm max. (at less than 10 Hz)
Utilities: Humidity: 80% max. (no condensation)
External Dimensions: Tester: Approx. 355 (W) x 405 (D) x 530 (H) mm
Control unit: Approx. 315 (W) x 375 (D) x 110 (H) mm
Micrometer: Minimum Measurement Increment: 0.01 µm/pulse
Micrometer: Detector: Optical encoder
Loading Unit: Loading Method: Electromagnetic coil
Displacement Measurement Unit: Measurement Method: ±2% of full scale (20 µm)
Loading Unit: Test Force Range: Full scale of 0.1 to 1,961 mN
Loading Unit: Test Force Accuracy: ±19.6 µN or ±1% of displayed test force, whichever is greater
Loading Unit: Minimum Measurement Increment: 0.196 µN (for a test force not exceeding 1.96 mN)
Displacement Measurement Unit: Measurement Method: Differential transformer
Displacement Measurement Unit: Measurement Method: 0 to 10 µm
Displacement Measurement Unit: Measurement Method: 0.0001 µm
Indenter: Type: Triangular pyramid indenter with tip angle of 115° (Vickers indenter and Knoop indenter are available as options.)
Micrometer: Collimation Method: Direct connection between encoder and control handle; synchronized movement of two indexes
Indenter: Tip Radius: 0.1 µm max.
Optical monitor: Total magnification: x500
Optical Monitor: Objective Lens: x50 (Up to 2 lenses can be attached.)
Optical Monitor: Eyepiece: x10
Optical Monitor: Lighting Method: Reflected illumination
Optical Monitor: Light Source (lamp): LED: 3 W, 3 V
Optical Monitor: Light-Path Switching: Observation or photograph (selectable)
Weight: Tester: Approx. 60 kg
Control unit: Approx. 5 kg
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