| Cat. No. | Description | Capacity | Specification | Unit | Price | Quantity |
|---|---|---|---|---|---|---|
| VAE1409993-01 | Cleaning of SUMMA canisters of various sizes (1/3/6/15L) and Tedlar bags | Sub-ppbv cleanliness | ≤0.020ppbv (≤20pptv) at 0psig | EA | Inquiry |
|
| Maximum Vacuum | ≤10mTorr |
| Number of Canisters | 4(customizable) |
| Heating Mode | Heating Belt (Standard), Heating Furnace (Optional) |
| Cleaning Gas | Ultrapure Nitrogen or Zero Air |
| Voltage | 110V/60Hz or 220V/50Hz±10% |
| Operating Environment | Temperature:-5~50℃; Humidity: 0-95%RH |
| System Pressure | 0~50psi |
| Maximum Power | 1kW |
| Dimensions | 290x455x476mm |
| Ports | TCP/IP |
| Operating System | Windows XP/7/8/10 |
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